Optimization of NEMS for Frequency Shift Sensing Applications

Citation

Bullard, Elizabeth Caryn (2016) Optimization of NEMS for Frequency Shift Sensing Applications. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/Z9GH9FZ2. https://resolver.caltech.edu/CaltechTHESIS:05272016-114505090

Abstract

This thesis has two areas of focus: the application of the dynamic similarity principle in microelectromechancial systems (MEMS) and nanoelectromechanical systems (NEMS) and the study of anomalous phase noise (APN) in MEMS and NEMS. In the first portion of the thesis, we employ the dynamic similarity principle to predict the quality factor due to gas damping in MEMS and NEMS. In the second portion of the thesis, we provide a theoretical framework for sources of phase noise in MEMS and NEMS and describe the measurements that we made to quantify the temperature dependence of anomalous phase noise in silicon doubly clamped beams.

Thesis Files