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Optimization of NEMS for Frequency Shift Sensing Applications


Bullard, Elizabeth Caryn (2016) Optimization of NEMS for Frequency Shift Sensing Applications. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/Z9GH9FZ2.


This thesis has two areas of focus: the application of the dynamic similarity principle in microelectromechancial systems (MEMS) and nanoelectromechanical systems (NEMS) and the study of anomalous phase noise (APN) in MEMS and NEMS. In the first portion of the thesis, we employ the dynamic similarity principle to predict the quality factor due to gas damping in MEMS and NEMS. In the second portion of the thesis, we provide a theoretical framework for sources of phase noise in MEMS and NEMS and describe the measurements that we made to quantify the temperature dependence of anomalous phase noise in silicon doubly clamped beams.

Item Type:Thesis (Dissertation (Ph.D.))
Subject Keywords:NEMS
Degree Grantor:California Institute of Technology
Division:Physics, Mathematics and Astronomy
Major Option:Physics
Thesis Availability:Public (worldwide access)
Research Advisor(s):
  • Roukes, Michael Lee
Thesis Committee:
  • Roukes, Michael Lee (chair)
  • Cross, Michael Clifford
  • Painter, Oskar J.
  • Yeh, Nai-Chang
Defense Date:29 March 2016
Record Number:CaltechTHESIS:05272016-114505090
Persistent URL:
Related URLs:
URLURL TypeDescription ItemArticle: Dynamic Similarity of Oscillatory Flows Induced by Nanomechanical Resonators ItemArticle: Single-protein nanomechanical mass spectrometry in real time ItemArticle: Frequency fluctuations in silicon nanoresonators
Bullard, Elizabeth Caryn0000-0001-8579-2147
Default Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:9787
Deposited By: Elizabeth Bullard
Deposited On:07 Mar 2017 01:04
Last Modified:04 Oct 2019 00:13

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