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Optimization of NEMS for Frequency Shift Sensing Applications

Citation

Bullard, Elizabeth Caryn (2016) Optimization of NEMS for Frequency Shift Sensing Applications. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/Z9GH9FZ2. http://resolver.caltech.edu/CaltechTHESIS:05272016-114505090

Abstract

This thesis has two areas of focus: the application of the dynamic similarity principle in microelectromechancial systems (MEMS) and nanoelectromechanical systems (NEMS) and the study of anomalous phase noise (APN) in MEMS and NEMS. In the first portion of the thesis, we employ the dynamic similarity principle to predict the quality factor due to gas damping in MEMS and NEMS. In the second portion of the thesis, we provide a theoretical framework for sources of phase noise in MEMS and NEMS and describe the measurements that we made to quantify the temperature dependence of anomalous phase noise in silicon doubly clamped beams.

Item Type:Thesis (Dissertation (Ph.D.))
Subject Keywords:NEMS
Degree Grantor:California Institute of Technology
Division:Physics, Mathematics and Astronomy
Major Option:Physics
Thesis Availability:Restricted to Caltech community only
Research Advisor(s):
  • Roukes, Michael Lee
Thesis Committee:
  • Roukes, Michael Lee (chair)
  • Cross, Michael Clifford
  • Painter, Oskar J.
  • Yeh, Nai-Chang
Defense Date:29 March 2016
Record Number:CaltechTHESIS:05272016-114505090
Persistent URL:http://resolver.caltech.edu/CaltechTHESIS:05272016-114505090
DOI:10.7907/Z9GH9FZ2
Related URLs:
URLURL TypeDescription
http://dx.doi.org/10.1103/PhysRevLett.112.015501Related ItemArticle: Dynamic Similarity of Oscillatory Flows Induced by Nanomechanical Resonators
http://dx.doi.org/10.1038/nnano.2012.119Related ItemArticle: Single-protein nanomechanical mass spectrometry in real time
http://dx.doi.org/10.1038/nnano.2016.19Related ItemArticle: Frequency fluctuations in silicon nanoresonators
ORCID:
AuthorORCID
Bullard, Elizabeth Caryn0000-0001-8579-2147
Default Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:9787
Collection:CaltechTHESIS
Deposited By: Elizabeth Bullard
Deposited On:07 Mar 2017 01:04
Last Modified:16 Nov 2017 21:24

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