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Henry, Michael David (2010) ICP Etching of Silicon for Micro and Nanoscale Devices. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/Z9MW2FBC. http://resolver.caltech.edu/CaltechTHESIS:05262010-152815609

This list was generated on Tue Dec 18 17:26:22 2018 PST.