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Jump to: 1984
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1984

Bartur, Meir (1984) Utilization of Silicides for VLSI-Contacts with Aluminum and Thermal Oxidation. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/V36Y-BW59. https://resolver.caltech.edu/CaltechETD:etd-11032005-130746

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