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Lien, Chuen-Der (1985) Thin Film Silicide Formation by Thermal Annealing: Study of Kinetics, Moving Species, Impurity Effect, and Electrical Properties. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/t5r5-5267. https://resolver.caltech.edu/CaltechETD:etd-03272008-074200

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