A Caltech Library Service

Browse by Author

Number of items: 1.

Henry, Michael David (2010) ICP Etching of Silicon for Micro and Nanoscale Devices. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/Z9MW2FBC. https://resolver.caltech.edu/CaltechTHESIS:05262010-152815609

This list was generated on Wed Jan 15 06:10:04 2025 UTC.

CaltechTHESIS is powered by EPrints 3.3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.