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Sputtering of insulators in the electronic stopping region


Griffith, Joseph Edward (1979) Sputtering of insulators in the electronic stopping region. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/b5x2-gf26.


Using track detectors we have measured sputtering yields induced by MeV light ions incident on a uranium containing glass, UO2 and UF4. No deviation from the behavior predicted by the Sigmund theory was detected in the glass or the UO2. The same was true for UF4 bombarded with 4He at 1 MeV and with 16O and 20Ne at 100 keV. In contrast to this, 4.75 MeV 19F(+2) sputters uranium from UF4 with a yield of 5.6 ± 1.0, which is about 3 orders of magnitude larger than expected from the Sigmund theory. The energy dependence of the yield indicates that it is generated by electronic rather than nuclear stopping processes. The yield depends on the charge state of the incident fluorine but not on the target temperature. We have also measured the energy spectrum of the uranium sputtered from the UF4. Ion explosions, thermal spikes, chemical rearrangement and induced desorption are considered as possible explanations for the anomalous yields.

Item Type:Thesis (Dissertation (Ph.D.))
Subject Keywords:Physics
Degree Grantor:California Institute of Technology
Division:Physics, Mathematics and Astronomy
Major Option:Physics
Thesis Availability:Public (worldwide access)
Research Advisor(s):
  • Tombrello, Thomas A. (advisor)
  • Burnett, Donald S. (advisor)
Thesis Committee:
  • Unknown, Unknown
Defense Date:7 May 1979
Record Number:CaltechTHESIS:10292015-093835228
Persistent URL:
Default Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:9257
Deposited By: Benjamin Perez
Deposited On:29 Oct 2015 21:56
Last Modified:13 May 2024 21:45

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