Integration of analog VLSI and thin films for chemical sensing arrays

Citation

Dickson, Jeffrey Allen (1999) Integration of analog VLSI and thin films for chemical sensing arrays. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/9rg8-4a38. https://resolver.caltech.edu/CaltechETD:etd-02062008-131420

Abstract

Chemical sensors are typically discrete elements, each sensitive to a particular odor. Current chemical sensing systems are unable to detect a wide range of chemicals. Moreover, the lack of an integrated sensor technology prevents the fabrication large arrays of chemical sensors.

A sensing technology is presented that integrates chemical sensors based on conducting carbon black particles and polymers with standard integrated circuit technology. An integrated circuit for array sensing is presented. The necessary post processing steps, consisting of and electroless gold deposition and subsequent polymer deposition, are discussed. The system is demonstrated to function as an array of individually addressable chemical sensors.

In addition, a novel nonvolatile analog storage element based on floating gates is presented. The application of this circuit and floating gate adaptation to ratiometric sensing is demonstrated.

Thesis Files