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A Thermalized Ion Explosion Model for High Energy Sputtering and Track Registration


Seiberling, Lucy Elizabeth (1980) A Thermalized Ion Explosion Model for High Energy Sputtering and Track Registration. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/sztw-3t72.


A velocity spectrum of neutral sputtered particles as well as a low resolution mass spectrum of sputtered molecular ions has been measured for 4.74 MeV 19F+2 incident on UF4. The velocity spectrum is dramatically different from spectra taken with low energy (keV) bombarding ions, and is shown to be consistent with a hot plasma of atoms in thermal equilibrium inside the target. We propose a "thermalized ion explosion" model for high energy sputtering which is also expected to describe track formation in dielectric materials. The model is shown to be consistent with the observed total sputtering yield and the dependence of the yield on the primary ionization rate of the incident ion.

Item Type:Thesis (Dissertation (Ph.D.))
Subject Keywords:Physics
Degree Grantor:California Institute of Technology
Division:Physics, Mathematics and Astronomy
Major Option:Physics
Thesis Availability:Public (worldwide access)
Research Advisor(s):
  • Tombrello, Thomas A.
Thesis Committee:
  • Tombrello, Thomas A.
Defense Date:21 May 1980
Record Number:CaltechTHESIS:09182018-160219748
Persistent URL:
Default Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:11187
Deposited By: Benjamin Perez
Deposited On:18 Sep 2018 23:53
Last Modified:19 Apr 2021 22:33

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