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The Design and Implementation of a Reticle Maker for VLSI


Gray, Moshe (1981) The Design and Implementation of a Reticle Maker for VLSI. Master's thesis, California Institute of Technology. doi:10.7907/0v5p-7011.


This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.

Item Type:Thesis (Master's thesis)
Subject Keywords:Computer Science
Degree Grantor:California Institute of Technology
Division:Engineering and Applied Science
Major Option:Computer Science
Thesis Availability:Public (worldwide access)
Research Advisor(s):
  • Unknown, Unknown
Thesis Committee:
  • None, None
Defense Date:February 1981
Record Number:CaltechTHESIS:03122018-162127158
Persistent URL:
Related URLs:
URLURL TypeDescription Science Technical Reports 19781.4299 in CaltechAUTHORS
Default Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:10770
Deposited By: Kathy Johnson
Deposited On:12 Mar 2018 23:33
Last Modified:16 Apr 2021 23:16

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