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The Design and Implementation of a Reticle Maker for VLSI

Citation

Gray, Moshe (1981) The Design and Implementation of a Reticle Maker for VLSI. Master's thesis, California Institute of Technology. http://resolver.caltech.edu/CaltechTHESIS:03122018-162127158

Abstract

This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.

Item Type:Thesis (Master's thesis)
Subject Keywords:Computer Science
Degree Grantor:California Institute of Technology
Division:Engineering and Applied Science
Major Option:Computer Science
Thesis Availability:Restricted to Caltech community only
Research Advisor(s):
  • Unknown, Unknown
Thesis Committee:
  • None, None
Defense Date:February 1981
Record Number:CaltechTHESIS:03122018-162127158
Persistent URL:http://resolver.caltech.edu/CaltechTHESIS:03122018-162127158
Related URLs:
URLURL TypeDescription
http://resolver.caltech.edu/CaltechCSTR:1981.4299-tr-81UNSPECIFIEDComputer Science Technical Reports 19781.4299 in CaltechAUTHORS
Default Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:10770
Collection:CaltechTHESIS
Deposited By: Kathy Johnson
Deposited On:12 Mar 2018 23:33
Last Modified:12 Mar 2018 23:33

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