Citation
Gray, Moshe (1981) The Design and Implementation of a Reticle Maker for VLSI. Master's thesis, California Institute of Technology. doi:10.7907/0v5p-7011. https://resolver.caltech.edu/CaltechTHESIS:03122018-162127158
Abstract
This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.
| Item Type: | Thesis (Master's thesis) | ||||||
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| Subject Keywords: | Computer Science | ||||||
| Degree Grantor: | California Institute of Technology | ||||||
| Division: | Engineering and Applied Science | ||||||
| Major Option: | Computer Science | ||||||
| Thesis Availability: | Public (worldwide access) | ||||||
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| Defense Date: | February 1981 | ||||||
| Record Number: | CaltechTHESIS:03122018-162127158 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechTHESIS:03122018-162127158 | ||||||
| DOI: | 10.7907/0v5p-7011 | ||||||
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| Default Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 10770 | ||||||
| Collection: | CaltechTHESIS | ||||||
| Deposited By: | Kathy Johnson | ||||||
| Deposited On: | 12 Mar 2018 23:33 | ||||||
| Last Modified: | 16 Apr 2021 23:16 |
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