CaltechTHESIS
  A Caltech Library Service

Micromechanical tuning elements for submillimeter wave integrated circuits

Citation

Lubecke, Victor Manuel (1996) Micromechanical tuning elements for submillimeter wave integrated circuits. Dissertation (Ph.D.), California Institute of Technology. http://resolver.caltech.edu/CaltechETD:etd-12182007-135252

Abstract

NOTE: Text or symbols not renderable in plain ASCII are indicated by [...]. Abstract is included in .pdf document.

Monolithic integrated circuit technology promises a practical means for realizing reliable and reproducible planar millimeter and submillimeter wave circuits. Planar circuits are fabricated through photolithographic techniques, which allow for the cost-effective production of intricate designs not possible with waveguide technology. Such circuits however, do not typically allow for post-fabrication optimization of performance. This can be a critical problem for the millimeter and submillimeter band, where device parasitics and fabrication tolerances are difficult to control and characterize. In this thesis, a micromechanical tuning element suitable for integration in a variety of monolithic millimeter and submillimeter wave circuits is presented. It is called a sliding planar backshort (SPB) and it can be fabricated as an integral part of a dielectric-coated coplanar transmission line. The SPB forms a movable short-circuit over a useful bandwidth, which allows for the variation of the transmission line's electrical length. A semiempirical approach was employed in its design. Measurements of [...] for the SPB at 2 GHz, were better than -0.5 dB over a bandwidth of at least 50% on both coplanar strip and coplanar waveguide transmission lines. A frequency-scaled version of the SPB was photolithographically fabricated and tested in a planar quasi-optical 100 GHz detector circuit. The response of a Schottky diode was successfully varied over a range of almost 14 dB, creating a 3 dB improvement over the untuned response. A technique for fabricating a micromechanical version of the SPB was developed. Two of these SPB's were fabricated as integral parts of a quasi-optical 620 GHz monolithic integrated detector circuit, where they were used to vary the measured response over a range of almost 15 dB. Such tuning elements can be used for characterizing developmental circuits, and for optimizing the in-use performance of various millimeter and submillimeter wave integrated circuits.

Item Type:Thesis (Dissertation (Ph.D.))
Degree Grantor:California Institute of Technology
Division:Engineering and Applied Science
Major Option:Electrical Engineering
Thesis Availability:Restricted to Caltech community only
Research Advisor(s):
  • Rutledge, David B.
Thesis Committee:
  • Unknown, Unknown
Defense Date:13 July 1995
Record Number:CaltechETD:etd-12182007-135252
Persistent URL:http://resolver.caltech.edu/CaltechETD:etd-12182007-135252
Default Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:5056
Collection:CaltechTHESIS
Deposited By: Imported from ETD-db
Deposited On:18 Jan 2008
Last Modified:26 Dec 2012 03:14

Thesis Files

[img] PDF (Lubecke_vm_1996.pdf) - Final Version
Restricted to Caltech community only
See Usage Policy.

10Mb

Repository Staff Only: item control page