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Investigation of novel semiconductor heterostructure systems : I: cerium oxide/silicon heterostructures. II: 6.1 °A semiconductor-based avalanche photodiodes

Citation

Preisler, Edward (2003) Investigation of novel semiconductor heterostructure systems : I: cerium oxide/silicon heterostructures. II: 6.1 °A semiconductor-based avalanche photodiodes. Dissertation (Ph.D.), California Institute of Technology. http://resolver.caltech.edu/CaltechETD:etd-06022003-071834

Abstract

The work presented in this thesis concerns the development of two different semiconductor heterostructure technologies. Part I describes research in the CeO2/silicon heterostructure system. Details are presented concerning the growth of CeO2 on silicon and the reactions that take place at the CeO2/silicon interface. The evolution of this interface as a function of annealing temperature and annealing ambient are studied via in situ x-ray photoelectron spectroscopy (XPS). Studies of metal-CeO2-silicon capacitors are also presented which help to determine the usefulness of this oxide as an alternative gate dielectric for silicon-based device applications. Part II involves research into the fabrication of avalanche photodiodes (APD's) utilizing the 6.1 A semiconductor system. Certain alloys of Al_xGa_(1-x)Sb are shown to greatly favor hole multiplication which is beneficial for both noise characteristics and gain-bandwidth product. Further, details are presented on the current investigation into using 6.1 A superlattices to acheive even more desirable detector performance.

Item Type:Thesis (Dissertation (Ph.D.))
Subject Keywords:Alternative Gate Dielectrics; Epitaxial Oxides; Optoelectronics
Degree Grantor:California Institute of Technology
Division:Engineering and Applied Science
Major Option:Applied Physics
Thesis Availability:Public (worldwide access)
Research Advisor(s):
  • McGill, Thomas C.
Thesis Committee:
  • McGill, Thomas C. (chair)
  • Vahala, Kerry J.
  • Yeh, Nai-Chang
  • Painter, Oskar J.
  • Tombrello, Thomas A.
Defense Date:19 March 2003
Author Email:ejpcmr (AT) yahoo.com
Record Number:CaltechETD:etd-06022003-071834
Persistent URL:http://resolver.caltech.edu/CaltechETD:etd-06022003-071834
Default Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:2373
Collection:CaltechTHESIS
Deposited By: Imported from ETD-db
Deposited On:04 Jun 2003
Last Modified:26 Dec 2012 02:50

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