Development and Dynamics of Microfabricated Enzymatic Biosensors

Citation

Adalian, Dvin Artashes-Boghos (2019) Development and Dynamics of Microfabricated Enzymatic Biosensors. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/7GHS-NX49. https://resolver.caltech.edu/CaltechTHESIS:06102019-031412552

Abstract

We have extended the application of microfabrication techniques to all parts of electrochemical enzymatic sensor processing and characterized the behavior of the resulting new sensor geometries. Improved and parallelized enzyme immobilization techniques utilizing spin coating along with porous sputtered platinum barrier layers are implemented on microfabricated platinum electrodes on silicon wafer substrates as well as on millimeter-scale wireless CMOS potentiostats. Functional biosensor sensitivities and linear ranges were observed with multi-month lifetimes, demonstrating that the enzyme layer fabrication process is compatible with precise and massively parallelized CMOS fabrication, making further progress toward the production of low cost and low-tissue impact fully implantable miniaturized biosensors.

Thesis Files